PFA Cassettes

PFA cassettes are designed for carrying and protecting 4-inch, 6-inch, 8-inch, and 12-inch wafers.

All PFA construction ensures the best chemical resistance to strong acids, strong bases, and corrosive organic solvents and high-temperature resistance of 200~220℃.


Part Number Material Wafer Size Storage Number
HL-PFA-4A,  HL-PFA-4B PFA 4 inch 25
HL-PFA-6A PFA 6 inch 25
HL-PFA-8A, HL-PFA-8B PFA 8 inch 25, 13
HL-PFA-12 PFA 12 inch 25