PFA Cassettes
PFA cassettes are designed for carrying and protecting 4″, 6″, and 8″ wafers.
All PFA construction ensures the best chemical resistance to strong acids, strong base, and corrosive organic solvents and high-temperature resistance of 200~220℃.
Specifications
| Part Number | Material | Wafer Size | Storage Number |
| HL-PFA-4A, HL-PFA-4B | PFA | 4 inch | 25 |
| HL-PFA-6A | PFA | 6 inch | 25 |
| HL-PFA-8A, HL-PFA-8B | PFA | 8 inch | 25 |
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