PFA Cassettes

PFA cassettes are designed for carrying and protecting 4″, 6″, and 8″ wafers.

All PFA construction ensures the best chemical resistance to strong acids, strong base, and corrosive organic solvents and high-temperature resistance of 200~220℃.


Part Number Material Wafer Size Storage Number
HL-PFA-4A,  HL-PFA-4B PFA 4 inch 25
HL-PFA-6A PFA 6 inch 25
HL-PFA-8A, HL-PFA-8B PFA 8 inch 25